Photolithography is an optical technique for transferring patterns from a glass photo masks onto semiconductor or glass substrates. P-150 is designed for 6” wafers. It has three contacts modes, hard contact, soft contact, and vacuum contact. The aligner has an UVsource with 350watt. The optical power gives 25 mW/cm² at 365 nm. It can be used in commercial semiconductor manufacturing or university laboratory settings, wafer fabrication facilities, and MEMS.