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Spin Coater System

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Spin Coater System

> SP-4
> SP-6
> SP-8
> SP-12

> SP-12C
> SP-300
> SD-8

SP-4

제품 사양
Equipment	SP-4
Substrate Size	Pieces~4 inch wafer
Spin Speed	50 ~ 6000 rpm
Recipe	20 Recipe, 10 step
Spin Acceleration	~ 10,000rpm/sec
Spin Motor	BLDC Motor
Spin Bowl	8 inch PP
Display	5“ LCD Touch screen
Vacuum Pump	Oil-less Vacuum Pump

SP-6

제품 사양
Equipment	SP-6
Substrate Size	Pieces~6 inch wafer
Spin Speed	100~6000 rpm
Recipe	20 Recipe, 10 step
Spin Acceleration	~10,000rpm/sec
Spin Motor	BLDC Motor
Spin Bowl	10 inch PP
Display	7’ LCD Touch screen
Control	PLC Touch control
Vacuum Pump	Oil-less vacuum pump
Size

SP-8

제품 사양
Equipment	SP-8
Substrate Size	Pieces~6 inch wafer
Spin Speed	100~6000 rpm
Recipe	20 Recipe, 10 step
Spin Acceleration	~10,000rpm/sec
Spin Motor	BLDC Motor
Spin Bowl	12 inch SUS
Display	7’ LCD Touch screen
Control	PLC Touch control
Vacuum Pump	Oil-less vacuum pump
Size

SP-12

제품 사양
Equipment	SP-12
Substrate Size	Pieces~12 inch wafer
Spin Speed	100~6000 rpm
Recipe	20 Recipe, 10 step
Spin Acceleration	~10,000rpm/sec
Spin Motor	AC Servo Motor
Spin Bowl	16 inch PP
Display	8.4’ LCD Touch screen
Control	PLC Control
PLC Control	Oil-less vacuum pump
Size

SP-12C

6~12 inch wafer & Ceramic

Spin Speed

50~5000 rpm

Recipe

coater : 20 Recipe, 15 step

8.4’ LCD Touch screen

Option
Coater	Developer
Dispense Nozzle	Dip Nozzle
Top EBR	Rinse Nozzle
Back EBP

SP 300 (wafer & Ceramic 용)

제품 사양
Equipment	SP 300
Substrate Size	Pieces~2 inch wafer & Ceramic
Spin Speed	100~4000 rpm
Recipe	20 Recipe, 20 step
Spin Motor	AC Servo Motor
Spin Bowl	20 inch SUS
Display	8.4’ LCD Touch screen
Control	PLC Touch control
Vacuum Pump	Oil-less vacuum pump
Nozzle	Chemical max 4ea
Canister	20L SUS

SD-8 (Spin Developer)

제품 사양
Equipment	SD-8
Substrate Size	Pieces~8 inch wafer
Spin Speed	100~4000 rpm
Recipe	20 Recipe, 20 step
Spin Motor	AC Servo Motor
Spin Bowl	18 inch PP
Display	8.4’ LCD Touch screen
Control	PLC Touch control
Vacuum Pump	Oil-less vacuum pump
Nozzle	Spray
Chemical	Developer
Chemical temp	20℃~30℃
Canister	20L SUS

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