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Mask Aligner

the Best Optics Expert. Mask Aligner

Mask Aligner

프로윈의 Mask Aligner는 감광액(PR: Photo Resist)이 도포된 반도체용 웨이퍼나 유리기판위에 회로가 그려진 포토 마스크를 올려놓고 UV를 조사함으로써 미세 패턴을 얻을 수 있는 Optical Lithography 장비입니다. 정밀 얼라인먼트가 가능하여 터치스크린 패널, 평판 디스플레이, MEMS/Bio-MEMS, LED 등의 정밀정렬 및 Patterning에 응용 가능합니다.

M-100

제품이미지

제품 사양
Equipment M-100
Type PLC Control Manual system
Mask Size up to 5”×5”
Substrate Size Piece to 4”
Resolution 1㎛
Alignment Accuracy 1㎛
Lamp & Power supply 350W
Wave Length 350~450nm
UV Intensity 15~25㎽/㎠
UV Beam Uniformity 3%
Contact Mode Vacuum / Hard / Soft / Proximity
Microscope Dual CCD Zoom Microscope
Option Anti-vibration table
IR BSA
CCD BSA
 

M-150

제품이미지

제품 사양
Equipment M-150
Type PLC Control Manual system
Mask Size up to 7”×7”
Substrate Size Piece to 6”
Resolution 1㎛
Alignment Accuracy 1㎛
Lamp & Power supply 350W
Wave Length 350~450nm
UV Intensity 15~25㎽/㎠
UV Beam Uniformity 3%
Contact Mode Vacuum / Hard / Soft / Proximity
Microscope Dual CCD Zoom Microscope
Option Anti-vibration table
IR BSA
CCD BSA
 

S-150

제품이미지

제품 사양
Equipment S-150
Mask Size 7”
Substrate Size 6”
Substrate chuck moving mode Manual/ (Z,θ motorized)
Lamp power 1kw
Beam uniformity 3~5%
UV Intensity 365nm~450nm / 365nm : 20mw/㎠
Resolution 1um
Alignment accuracy 1um
Operation Manual / semi-auto
Contact mode soft, hard, vacuum, proximity
Control type Manual, touch, joystick
 

P-150

제품이미지

제품 사양
Equipment P-150
Type Touch PC Control Manual system
Mask Size up to 7”×7”
Substrate Size Piece to 6”
Resolution 1㎛
Alignment Accuracy 1㎛
Lamp & Power supply 350W
Wave Length 350~450nm
UV Intensity 15~25㎽/㎠
UV Beam Uniformity 3%
Contact Mode Vacuum / Hard / Soft / Proximity
Microscope Dual CCD Zoom Microscope
Option Anti-vibration table
IR BSA
CCD BSA
 

S-200

제품이미지

제품 사양
Equipment S-200
Type Touch PC Control & Joystick Semi-auto system
Mask Size up to 7”×7”~14”×14”
Substrate Size Piece to 6”~12’
Stage X, Y, X, θ Motorize control
Lamp & Power supply 350W ~ 2000W
Wave Length 350~450nm
UV Intensity 15~25㎽/㎠
UV Beam Uniformity 3~5%
Resolution 1um
Alignment accuracy 1um
Contact Mode Vacuum / Hard / Soft / Proximity
Control Mode Manual / Semiauto / Joystick
Microscope Dual CCD Zoom Motorize Microscope
Option Anti-vibration table
CCD BSA
 

F-200

제품이미지

제품 사양
Equipment F-200
Type Touch PC Control & Joystick Semi-auto system
Mask Size up to 9”×9”
Substrate Size 8”
Stage X, Y, X, θ Motorize control
Lamp & Power supply 1000W
Wave Length 350~450nm
UV Intensity 15~25㎽/㎠
UV Beam Uniformity 3~5%
Resolution 1um
Alignment accuracy 1um
Contact Mode Vacuum / Hard / Soft / Proximity
Control Mode Full Auto
Microscope Dual CCD Zoom Microscope
Option Anti-vibration table
CCD BSA
 

S-300

제품이미지

제품 사양
Equipment S-300
Type Touch PC Control & Joystick Semi-auto system
Mask Size up to 7”×7”~14”×14”
Substrate Size Piece to 6’~12”
Stage X, Y, X, θ Motorize control
Lamp & Power supply 350W ~ 2000W
Wave Length 350~450nm
UV Intensity 15~25㎽/㎠
UV Beam Uniformity 3~5%
Resolution 1um
Alignment accuracy 1um
Contact Mode Vacuum / Hard / Soft / Proximity
Control Mode Manual / Semiauto / Joystick
Microscope Dual CCD Zoom Motorize Microscope
Option Anti-vibration table
CCD BSA
 

M-500

제품이미지

제품 사양
Equipment M-500
Type PLC Touch Control system
Mask Size 500mm×500mm 이상
Substrate Size 370mm×470mm
Resolution 10㎛
Lamp & Power supply 5000W
Wave Length 350~450nm
UV Intensity 15~20㎽/㎠
UV Beam Uniformity 5~7%
Contact Mode Vacuum / Hard / Soft / Proximity
Microscope Dual CCD Zoom Microscope
Option X,Y,X,θ Motorizing
Scope Motorizing
 

T-700

제품이미지

제품 사양
Equipment T-700
Beam Size Up to 800 mm×800 mm
Resolution Less Than 10㎛ [@PR] in Proximity
Alignment Accuracy Less Than ± 5.0 ㎛
Alignment Semi Auto / Auto
Substrate Size 700 mm×700 mm
Lamp Power 8 kW NUV
Wave Length 365 nm
UV Intensity 20 mW/cm2
UV Beam Uniformity Less Than ± 5 % [700 mm×700 mm]
Contact Mode Hard/Soft and Proximity
Chuck Incremental Z-Motion Accuracy 1 ㎛
Microscope Dual Motorizing Zoom Microscope
Operation System Auto, Semi Auto
 

L-100

제품이미지

제품 사양
Equipment L-100
Type PLC Control Manual system
Mask Size Max 7”×7”
Substrate Size Piece to 6”
Resolution 1㎛
Alignment Accuracy 1㎛
UV Lamp & Power UV LED & POWER SUPPLY
Wave Length 365nm
UV Intensity ~40㎽/㎠
UV Beam Uniformity 3~5%
Contact Mode Vacuum / Hard / Soft / Proximity
Microscope Dual CCD Zoom Microscope
Option nti-vibration table
IR BSA,CCD BSA
 
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